Customized UHV Chamber

To customize the ultrahigh vacuum (UHV) chamber, contains the spherical chamber, cylindrical chamber and square chamber, all they are applied in ultrahigh vacuum (UHV) environment. CF flange sizes are available from CF16 to CF200. If you need bigger or special specifications of the CF cubes, please contact us and provide the drawing. Htc Vacuum will customize accordingly.

Product Case

Custom-designed vacuum chamber

Customized UHV cylinder chamber

Customized UHV rectangle chamber

Customized UHV spherical chamber

Customized UHV cylinder chamber

Material：S.S.304
Surface: Electro-polished
Spec: CF200 cylinder UHV chamber
Leakage rate: 2 x 10^-10mbar.l/sec
Operation pressure<5 x10^-10 torr
flange concentricity < 0.2ﾟ