Vacuum poppet valves
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Angle Valve | Manually Operated
Tube End with Bellows(USA)
KF Flange with Bellows(USA)
CF Rotatable Flange with Bellows(USA)
ISO Flange with Bellows(USA)
KF Flange with Bellows(Europe)
CF Rotatable Flange with Bellows(Europe)
ISO Flange with Bellows(Europe)
Tube End without Bellows(USA)
KF Flange without Bellows(USA)
KF Flange without Bellow(Europe)
Copper Seal Bonnet Tube End with Bellows
Copper Seal Bonnet KF Flange with Bellows
Copper Seal Bonnet CF Flange with Bellows
Vacuum angle valve is one type of the poppet valves. When the poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the valve stem actuator moves the poppet to the bottom of the valve, an elastomer sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow. Htc vacuum offers a wide variety of valve types in a comprehensive range of sizes. They are manually and pneumatically, with bellows and without bellows.Port terminations are available in KF, ISO, CF, and Tube End. Htc vacuum designs all series angle valves suited for vacuum applications with venting processes, high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
- Body: 304 S.S. (Other material available upon request)
- Poppet: 304 S.S. (Other material available upon request)
- Port ODs: 3/4 ~ 8 inch(19.05 ~ 203.2mm)
- Bellows: Welded AM-350(option)
- valve stem seal: Viton O’ring
- Leak rate: 2×10-9 mbar-l/sec
- Pressure range: 1×10-9mbar to1000 mbar Viton seal bonnet
- Maximun △pressure before opening: 1.2 Bar
- Recommended screw locking torque
ISO angle vacuum valve specification:
ISO-63 ~ ISO-160 100 Kg-cm
ISO-200 ~ ISO-320 140 Kg-cm
CF angle vacuum valve specification:
CF 35 170 Kg-cm
CF-50 ~ CF-200 210 Kg-cm
CF-250 ~ CF-300 360 Kg-cm - Bake-out limitation:
Bake Temperature
Valve body
O-ring bonnet seal
Open ≤ 100℃
Close ≤ 100℃
metal bonnet sea
Open ≤ 200℃
Close ≤ 150℃
Manual and pneumatic actuator
≤ 80℃
Warranty conditions :
1. The period of warranty shall start from the date of delivery of the product to the customer and shall cover a period of 1 year, or the specific life cycles, whichever comes first.
2. Operation only in air, inert gas and vacuum.
3. Warranty will not apply to the damages caused by nature disasters, faulty usages or consumable purposes.
Htc vacuum poppet valve will function reliably in applications ranging from semiconductor production system with chemical and particulate contamination. They can be used in rough vacuum, high vacuum , or ultra-high vacuum environment.
Htc vacuum poppet valves have KF, ISO and ANSI port models, are designed for high vacuum applications where vacuum pressures approximate 10-9 torr and bake-out temperature do not exceed 150℃. Htc vacuum offers manual operated poppet valves or pneumatic actuated poppet valves with bellows attached reed sensor, include angle valves, z-inline valves, y-inline valves, and vacuum ball valves.
Vacuum poppet valve specifications
- Body: 304 S.S. (Other material available upon request)
- Poppet: 304 S.S. (Other material available upon reques)
- Bellows: Welded AM-350 (option)
- Solenoid: Option
- Position indicator: Option
- Seal: Viton Oring
- Leak rate: 2x10-9 mbar.l/sec
- Pressure range: 1x10-9 mbar to 1000 mbar Viton seal bonnet
- MaximumΔpressure before opening: 1.2 bar
- Opening air pressure: 4~6.5 kg/cm2
- Cycles until service:
Bellows type:16 to 50~500,000 ; 63 to 150~250,000
No Bellows type: 10 to 50~200,000 ; 63 to 150~100,000 (Depend on Oring condition)
No Bellows type : Suggest to install in vertical orientation
200 to larger~application dependent - BakeTemperature:
Valve Body Oring bonnet seal Open ≤ 100℃ Close ≤ 100℃ Metal bonnet seal Open ≤ 200℃ Close ≤ 150℃ Manual and pneumatic actuator ≤ 80℃ - Large or special size available upon request
