- Ultra-High Vacuum Chamber
- A07 - EBARA dry pump kits
- A10S - EBARA dry pump kits
- A30 - EBARA dry pump kits
- A70W - EBARA dry pump kits
- A150W - EBARA dry pump kits
- 40.20 - EBARA dry pump kits
- 50.20 - EBARA dry pump kits
- 80.25 - EBARA dry pump kits
- 150.40 - EBARA dry pump kits
- AA10 - EBARA dry pump kits
- AA20 - EBARA dry pump kits
- AA40 - EBARA dry pump kits
- AA200 - EBARA dry pump kits
- パーフロロエラストマー Oリング (FFKM)
Rectangular transfer gate Valve and doors
HTC vacuum rectangular valves use directly actuating technology. Valve body is appropriate size and compact design. All moving parts are located in atmospheric side that could reduce the particle occur in vacuum side and raise the life cycle. Other advantages include self-lock of gate seal upon air pressure loss, easy gate disassembly for maintenance etc.
Vacuum rectangular valves are used widely in coaters of semiconductor, optoelectronics industry. Most of the valves are installed on load-lock chamber, between load-lock chamber and transfer chamber, also transfer chamber and process chamber. Enable transferring and processing being isolated for vacuum by the valves.
Example of vacuum rectangular valves install on cluster chamber
Design principle / feature
l Low vibration and low particles.
l Cam mechanism and spring enable sealing motion.
l Twin air-cylinders, single forcing shaft.
l Actuator shaft push auxiliary.
l Self-lock seal protection upon air pressure loss.
l Seal gate quick dismantling, easy for O ring change.
One million life cycles.
l Standard Rectangular Transfer valves
l Rectangular doors
l Large rectangular transfer valves
l Large rectangular doors
Aluminum or Stainless
Body Surface treatment
Electrolytic polishing or Hard anodized Aluminum